TSI 5200 Series Mass Flow Meter


The TSI 5200 Series of low flow thermal mass flow meters provide increased resolution and accuracy at flow rates under 1 L/min. The 5200 Series flow body is designed with a reduced internal volume to minimize circuit dead space and provide highly accurate volume measurements. Low flow meters from TSI are used as a flow reference for the calibration of sampling instrumentation as well as many other low flow applications.

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  • 4 millisecond bi-directional flow response
  • High accuracy (±2% of reading, ±1.5% of reading optional)
  • Low pressure drop minimizes back pressure
  • Wide dynamic operating range (1000:1 turndown ratio)
  • Multiple gas calibrations available, user-selectable
  • Measure up to 6 parameters with a single instrument
  • Display four measurement parameters simultaneously
  • 2.8 inch color touchscreen operation
  • Configurable tube end connectors
  • Data logging options
  • USB power and data communications
  • 10 Point NIST-traceable Calibration Certificate included
  • Temperature and pressure compensated, optional humidity compensation
  • Comes with basic FLO-Sight™ PC software


  • Product Development
  • Manufacturing
  • Quality Assurance
  • Research
  • Metrology
  • Field Service


TSI’s Next Generation Flow Meter

Instrument Overview of the TSI 5000 Series Mass Flow Meter

Advanced Features of the TSI 5000 Series Mass Flow Meter

TSI FLO Sight PC Software Overview

Making Volume Measurements with TSI 5000 Series Mass Flow Meter



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TSI 5200-0375IN 5200 Series 3/8 Inch Tube Ends

TSI 5200-10MM 5200 Series 10mm Tube Ends

TSI 5200-C 5200 Series Collars

TSI 5200-IF-025IN 5200 Series Inlet Filter 1/4 Inch – Low Pressure

TSI 5200-IF-0375IN 5200 Series Inlet Filter 3/8 Inch – Low Pressure

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TSI 5200 Series Standard Accessory Kit


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TSI 5000-TTS 5000 Series Tabletop Stand

TSI 5000-RS232 5000 Series USB-A to RS232 Cable

TSI 5000-USB-LOCK 5000 Series USB-C to A Cable Screw Lock

TSI 5000-USBC-A 5000 Series USB-C to USB-A Cable

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TSI 5000-WMDRK 5000 Series Wall Mounting DIN Rail Kit

TSI 5000-WMK 5000 Series Wall Mounting Kit

TSI 5000-WMMP 5000 Series Wall Mounting Meter Plate