LiQuilaz® UL1604 compatible particle counters allow continuous, real-time monitoring of fluid particle contamination levels in Class I, Div II environments. Reduce costs with particle counters that can be installed without modification into these critical monitoring areas. Volumetric sampling with sizing sensitivities as low as 0.2 μm reduces sample time required to achieve statistical significance. Easily integrates into Facility Net software to provide an economical way to monitor multiple flow systems.

• Cost Effective
• Packaged for easy installation into Class I, Div II environments
• Particle measurements for solvents, chemicals, and DI water
• Simplify data analysis by using the same sensor throughout all of your fabs
• Optimize sensor selection for specific chemical requirements
• Low initial capital investment because packaging has already been completed
• Sealed package protects sensor from accidental chemical spills
• High resolution volumetric particle counter for improved accuracy and tighter process control