Particle Counters (UL1604 Compatible Available) - HSLIS M65
HSLIS M65 UL1604 compatible particle counters allow continuous, real-time monitoring of fluid particle contamination levels in Class I, Div II environments. Reduce costs with particle counters that can be installed without modification into these critical monitoring areas. Sizing sensitivity of 0.065 μm. Easily integrates into Facility Net software to provide an economical way to monitor multiple flow systems.
- Cost Effective
- Packaged for easy installation into Class I, Div II environments
- Particle measurements for solvents, chemicals, and DI water
- Simplify data analysis by using the same sensor throughout all of your fabs
- Low initial capital investment because packaging has already been completed
- Sealed package protects sensor from accidental chemical spills
Features & Benefits
- 0.065 μm sensitivity
- Ethernet or RS-485 communication
- 4-20 mA outputs with Ethernet system
- Sealed enclosure
- Sample volumes to 80 mL/min
Applications
- Qualify particle concentrations in flammable solvents
- Monitor chemical delivery systems
- In-line measurements in recirculating baths
- Quality assurance
- Continuous monitoring for process improvement
Literature
Brochure 263Kb