Point-of-Use Ion Mobility Spectrometer - AirSentry II - 2
Particle Measuring Systems’ newest Airborne Molecular Contamination (AMC) monitor, the AirSentry® II monitor, was designed with performance in mind. The new Ion Mobility Spectrometry (IMS) cell provides art-per-trillion (ppt) sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis. By maximizing the value of contamination information delivered, including high-sensitivity uninterrupted data, the AirSentry II monitor allows smarter decisions to be made for locating, controlling, and preventing molecular contamination.
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Continuous monitoring of a critical point-of-use location
- Single external Calibration Station ensures analyzer to analyzer matching
- Robust and reliable data acquisition, control, and analysis
- No moving parts
- Infrequent maintenance
Features & Benefits
- 70 ppt limit of detection
- Patented IMS technique
- 0-50 ppb dynamic range
- Small footprint, stackable design
- Data output via Ethernet interface to Facility Net software
Applications
- Exposure optics - hazing and lens warranty data
- Reticle stage - reticle hazing
- Resist track - dispense/develop contamination (t-topping)
- Reticle inspection tool and stockers - storage contamination
- Ambient cleanroom monitoring - baseline contamination
- Make-up and recirculated air analysis - contamination
Literature
Brochure 231Kb