The HPGP-101-C monitors contaminants in process gases at line pressure. This system includes the probe and a PDS-PA data system which collects and reports data.
Speed qualification of process gas distribution systems.
Detect particles in gases before they impact yield
Compatible with oxygen, hydrogen, and most non-toxic gases
Particle Counter High Pressure Gas
The Micro LPC-101 HP samples inert pressurized gases at their line pressures. This system outputs data to an external printer or computer.
Unlike other systems, the Micro LPC-101 HP requires no fluids for monitoring. Samples inert pressurized gases at their line pressure. 0.1 micron sensitivity at 0.1 SCFM
Particle Counting Gas Applications
Papers Relating to Gas Particle Counting Applications.
Semiconductor cleanrooms are serviced by high-purity gas distribution systems. Sematech has released a standard that presents a test method that may be applied for the evaluation of one or more valves, considered for use in such systems. The test method described in the standard is expected to give comparable data among valves tested for the purposes of qualification for this installation.
